MEETINGS

GEC 64 Workshop
Control of Distribution Functions in Low Temperature Plasmas

November 14, 2011 (Monday)

Salt-Lake City, UT

Overview

The DOE Plasma Science Center on Control of Plasma Kinetics organized a one-day workshop prior to the official start of GEC 2011 on the topic of controlling f(v,r), in low temperature plasmas. The workshop addressed current research in methods of controlling the f(v,r) of electrons, ions and neutrals, discuss the challenges facing the field and develop a roadmap of priorities to achieve the control.

Program and Abstracts

Presentations

Igor Kaganovich
Introduction

Valery Godyak
Electron Temperature Modification in Gas Discharge Plasma

David Graves
Plasma-Surface Interactions and the Control of Plasma Distribution Functions

Uwe Kortshagen
Energy Distribution Functions of Ions Hitting Nanoparticles in Nonthermal Plasmas

Noah Hershkowitz
Electron Energy Distribution Functions Modified by MacKenzie Maxwell Demons

Scott Robertson
Multiple Electron Distributions in Multidipolar Plasma Devices

Alexander S. Mustafaev
Volumetric Control of Anisotropic Electron Distribution Functions in Plasmas with Langmuir Oscillations

Chi-Shung Yip
The Langmuir Paradox: Can the Ion Acoustic Instability at the Sheath Edge Thermalize the Ions too?

Anatoly Kudryavtsev
Physical Mechanisms of the Electron Energy Distribution Function Control in Inhomogeneous Non-stationary Plasma

Rod Boswell
Experiments, Simulations and Modelling of the Electron Energy Distribution Functions in Low Pressure rf Excited Non-Local Plasmas

Zoran Petrovic
Control of Electron Energy Distribution Function by High Frequency Fields and by the Effect of Crossed Magnetic Field

Vladimir I. Demidov
Nonlocal Control of Electron Energy Distribution Functions in Plasmas with Active Boundaries

Uwe Czarnetzki
Control of Ion and Electron Distribution Functions by the Electrical Asymmetry Effect

Gottlieb S. Oehrlein
Plasma-Surface Interactions and Impact on Electron Energy Distribution Function

Miles M. Turner
Is Particle Distribution Control Necessary in Plasma Etching Processes?

Michael A. Lieberman
Fast Analytical-Numerical Model of Atmospheric Pressure Radio-Frequency Capacitive Discharges

Greg Severn
Kr ion Laser-Induced Fluorescence Using a Tunable Diode Laser Near 729nm

Alexander V. Khrabrov
Simulating Electron Scattering in Cold-Cathode Discharges

Fred Skiff
Measurement of the Perturbed Distributions of Electrons and Ions

GEC 66 Preconference Tutorials
Fundamental Processes, Modeling and Diagnostics of Low-Temperature Plasmas

September 28-29, 2013 (Saturday-Sunday)

Princeton, NJ

Overview

The preconference tutorial was offered to the GEC community as an educational service by the DOE Center for "Predictive Control of Plasma Kinetics: Multi-phase and Bounded Systems". The speakers introduced important topics in plasma physics related to plasma processing applications.