MEETINGS
1st Annual Meeting - May 10-11, 2010
2nd Annual Meeting - May 12–13, 2011
GEC 64 Workshop - November 14, 2011
3rd Annual Meeting - May 17–18, 2012
4th Annual Meeting - May 16–17, 2013
GEC 66 Preconference Tutorials - September 28-29, 2013
5th Annual Meeting - May 15–16, 2014
6th Annual Meeting - June 10-11, 2015
7th Annual Meeting - May 26-27, 2016
GEC 64 Workshop
Control of Distribution Functions in Low Temperature Plasmas
November 14, 2011 (Monday)
Salt-Lake City, UT
Overview
The DOE Plasma Science Center on Control of Plasma Kinetics organized a one-day workshop prior to the official start of GEC 2011 on the topic of controlling f(v,r), in low temperature plasmas. The workshop addressed current research in methods of controlling the f(v,r) of electrons, ions and neutrals, discuss the challenges facing the field and develop a roadmap of priorities to achieve the control.
Program and Abstracts
Presentations
- Igor Kaganovich
Introduction - Valery Godyak
Electron Temperature Modification in Gas Discharge Plasma - David Graves
Plasma-Surface Interactions and the Control of Plasma Distribution Functions - Uwe Kortshagen
Energy Distribution Functions of Ions Hitting Nanoparticles in Nonthermal Plasmas - Noah Hershkowitz
Electron Energy Distribution Functions Modified by MacKenzie Maxwell Demons - Scott Robertson
Multiple Electron Distributions in Multidipolar Plasma Devices - Alexander S. Mustafaev
Volumetric Control of Anisotropic Electron Distribution Functions in Plasmas with Langmuir Oscillations - Chi-Shung Yip
The Langmuir Paradox: Can the Ion Acoustic Instability at the Sheath Edge Thermalize the Ions too? - Anatoly Kudryavtsev
Physical Mechanisms of the Electron Energy Distribution Function Control in Inhomogeneous Non-stationary Plasma - Rod Boswell
Experiments, Simulations and Modelling of the Electron Energy Distribution Functions in Low Pressure rf Excited Non-Local Plasmas - Zoran Petrovic
Control of Electron Energy Distribution Function by High Frequency Fields and by the Effect of Crossed Magnetic Field - Vladimir I. Demidov Nonlocal Control of Electron Energy Distribution Functions in Plasmas with Active Boundaries
- Uwe Czarnetzki
Control of Ion and Electron Distribution Functions by the Electrical Asymmetry Effect - Gottlieb S. Oehrlein
Plasma-Surface Interactions and Impact on Electron Energy Distribution Function - Miles M. Turner
Is Particle Distribution Control Necessary in Plasma Etching Processes? - Michael A. Lieberman
Fast Analytical-Numerical Model of Atmospheric Pressure Radio-Frequency Capacitive Discharges - Greg Severn
Kr ion Laser-Induced Fluorescence Using a Tunable Diode Laser Near 729nm - Alexander V. Khrabrov
Simulating Electron Scattering in Cold-Cathode Discharges - Fred Skiff
Measurement of the Perturbed Distributions of Electrons and Ions
GEC 66 Preconference Tutorials
Fundamental Processes, Modeling and Diagnostics of Low-Temperature Plasmas
September 28-29, 2013 (Saturday-Sunday)
Princeton, NJ
Overview
The preconference tutorial was offered to the GEC community as an educational service by the DOE Center for "Predictive Control of Plasma Kinetics: Multi-phase and Bounded Systems". The speakers introduced important topics in plasma physics related to plasma processing applications.
Tutorial Program
Presentations
- M.A. Lieberman
Introduction to Gas Discharges and Plasma Processing - R. Boswell
Fundamentals of Etching and Basics of Multi-frequency Processing Systems - V.M. Donnelly
Introduction to Plasma and Surface Diagnostics - J.P. Sheehan
Plasma Diagnostics I: Emitting Probes - V.I. Demidov
Plasma Diagnostics II: Wall Probes - V.A. Godyak
Plasma Diagnostics III: Probes for RF discharges - I.D. Kaganovich
Introduction to Kinetic Modeling in Low-Temperature Plasmas - V.I. Kolobov
Kinetic Modeling Based on the Boltzmann Equation - D. Sydorenko
Particle-in-cell Modeling of Low-Temperature Plasmas